As an optical technique, spectroscopic ellipsometry is non-destructive and contactless. Ellipsometry is a very sensitive measurement technique and provides unequalled capabilities for thin film metrology. It has applications in many different fields, from semiconductor physics to microelectronics and biology, from basic research to industrial applications. Thermal Transition Temperature MeasurementĮllipsometry is a versatile and powerful optical technique for the investigation of the dielectric properties (complex refractive index or dielectric function) of thin films.
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